Hiroyuki Shimizu
Applied Surface Science
Introduction
Zinc oxide is a large bandgap semiconductor that is being studied for uses in nanostructures and thin film optoelectronic devices.
The properties of thin zinc oxide films are sensitive to its different forms of its crystal structure. The properties of the thin films produced by magnetron sputtering can be anlayzed with X-ray, electrical and optical methods such as PL spectroscopy. The PL spectrum shows distinct changes depending on the zinc oxide polarity.